Aerotech: Linear Motor Drive Precision Stage (ANT95-L Series)

Linear Stages

Aerotech manufactures a large selection of positioning stages including linear stage models that utilize our own brushless linear direct-drive servomotors, as well as ball-screw models driven with Aerotech brush or brushless rotary motors. Innovators in linear stage design, manufacture and integration, Aerotech builds linear positioning stages for high-performance applications in industrial robots, fiber optics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, laser micromachining, electronic manufacturing, and other industrial automation applications.

Aerotech linear stages are available in X, XY and XYZ combinations to meet your motion requirements.

ANT95-L Series Single-Axis Linear Direct-Drive Nanopositioning Stages

Design Features

Introduction

Aerotech’s ANT95-L series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-L and ANT95-L-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. These linear stages exhibit up to 5 g acceleration, 500 mm/s velocity, enhanced load capacity and are available with standardized, universal base mounting patterns that allow their use in a wide range of configurations.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-L stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95-L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-L stage’s industry-leading 1 nm minimum incremental step size provides this high level of performance. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Model No.: ANT95-100-L, ANT95-100-L-PLUS, ANT95-25-L, ANT95-25-L-PLUS, ANT95-50-L, ANT95-50-L-PLUS, ANT95-75-L, ANT95-75-L-PLUS