High-resolution, high-accuracy sealed type linear scales. Most ideal for feedback control in positioning a semiconductor manufacturing system, CNC machine tool, etc.

Two types of models are available: the AT211-A, the multiple-point installation type designed for improved resistance against vibration and shock, and the AT211-B, which attaches to a machine at both ends. The AT211-B is compatible with the AT111 slim type in size.

Effective range: 4 – 60”(100 - 1500mm)

Output signal: Two 90° phase-shifted quadrature signals

Maximum response speed: 5.4 - 120m/min.

Resolution: 0.1, 0.2, 0.5, 1, 2.5, 5µm

Signal output pitch: 20µm

Dust/Water protection level: IP53

Accuracy at 20ºC:

Effective range | Standard type | High-accuracy type

100 to 500mm | (3+3L/1000)µm | (2+2L/1000)µm

500 to 1500mm | (3+3L/1000)µm | —

L = Effective range (mm)