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MicroE: Optical Linear Encoders (Mercury™ Series)
High Vacuum | Compact Precision Encoders for High Vacuum Applications
Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10-8 torr.
Model: M1000V
Resolutions from 5µm to 78nm, 1Vpp analog interface with index, accuracy to +/-1 µm/m, rated for vacuum 10-8 Torr.
Product Benefits:
The M1000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
Miniature sensor fits into tight spaces
Wide alignment tolerance make for easy installation and setup
Analog outputs can be interpolated by the customer’s electronics for resolution up to 78nm
Low power consumption aids in thermal stability of the system
Model: M1500V
Resolutions from 5µm to 0.5µm, A-quad-B digital interface with index, accuracy to +/-1 µm/m, rated for vacuum 10-8 Torr.
The M1500V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
Built-in interpolation produces digital outputs with up to 0.5μm resolution
Model No.: M1000-MV, M1550V-04, M1550V-08, M1550V-20, M1550V-40