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MicroE: Optical Linear Encoders (Mercury II™ Series)
High Vacuum | Compact Precision Encoders for High Vacuum Applications
Mercury II™ digital output high-vacuum rated encoders offer class-leading resolution, accuracy, and small sensor size. With MicroE’s broad alignment tolerances, no other commercially available 10-8 Torr rated encoder is easier to align, easier to use, or easier to integrate into your designs.
Resolutions from 5µm to 1.2nm, A-quad-B digital interface with index and limits, accuracy to +/-1 µm/m, rated for vacuum 10-8 Torr.
Benefits
The MII 6000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
Mercury II’s encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter, smaller sensors, and lower power consumption.
Mercury II’s low cyclical error surpasses every other 20μm encoder. The benefits are smoother velocity control for linear motors, stages and wire bonders; More precise, and faster linear positioning.
Smallest scale system available: only 6mm wide, including index and limits - less than 1/2 the width of other encoder systems.
Broadest Alignment Tolerances: With the broadest alignment tolerances in the industry, a full +/-2 degrees, Mercury II is the easiest and the fastest sensor to align and setup. You can align the Mercury II sensor in under 30 seconds.
Built-in Optical Index and Limits: Order linear glass scales with built-in markers for fast installation.