Aerotech: Linear Motor Drive Precision Stage (MPS75SL Series)
Aerotech manufactures a large selection of positioning stages including linear stage models that utilize our own brushless linear direct-drive servomotors, as well as ball-screw models driven with Aerotech brush or brushless rotary motors. Innovators in linear stage design, manufacture and integration, Aerotech builds linear positioning stages for high-performance applications in industrial robots, fiber optics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, laser micromachining, electronic manufacturing, and other industrial automation applications.
Aerotech linear stages are available in X, XY and XYZ combinations to meet your motion requirements.
MPS75SL Mechanical-Bearing Ball-Screw Linear Stage
Compact 75 mm width with travel to 100 mm
Precision ground ball-screw drive
DC servo or stepper motor
Anti-creep crossed-roller bearings
High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
High-vacuum compatible
Optional bellows waycovers
Compact multi-axis configurations
The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.
The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
Optional Vacuum Preparation
The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.
The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
Model No.: MPS75SL-025, MPS75SL-050, MPS75SL-075, MPS75SL-100