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Zygo: Laser Interferometer (Verifire™ XL Series)
Zygo: Laser Interferometer (Verifireâ„¢ XL Series)
 
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Zygo: Laser Interferometer

Laser interferometers from ZYGO were first introduced commercially over 35 years ago. Today, ZYGO continues to maintain the leadership role in surface form metrology using laser interferometry. Thousands of ZYGO interferometers are installed worldwide and relied upon daily to provide accurate production measurements of optical components and assemblies, things that affect our daily lives. Applications span across a wide range of industries, including consumer electronics, ophthalmology, semiconductor and defense & aerospace. ZYGO is the one optical metrology company that is trusted across the globe to qualify the world's most critical and precise optics. Shouldn't you be using a ZYGO laser interferometer?

DynaFiz™ Dynamic Interferometers - highly optimized dynamic Fizeau laser interferometer for performing the most precise measurement of optics in the presence of air turbulence and extreme vibrations.

Verifire™ Fizeau Interferometer Series - the ideal interferometry choice for accurate metrology of surface form. Verifire laser interferometers are used worldwide in quality control, R&D, and production test applications. The Verifire family of interferometers are quantitative phase shifting interferometers for use in the measurement of flat, spherical and aspheric optics.

Large Aperture Interferometer Systems - Large Aperture Fizeau Interferometers are available for static and phase measuring applications with 12", 18", 24" and 32" apertures (300 mm to 800 mm). ZYGO's large aperture beam expanders are an optional extension to the Verifire™ and GPI™ interferometers. Taking advantage of ZYGO's powerful lasers, the beam expanders are configured to provide both a standard 4" measurement beam and a large aperture metrology source.

GPI™ LC Laser Interferometer - The GPI™ LC interferometer allows you to perform visual fringe analysis of flat or spherical surfaces, and transmitted wavefront measurement of optical components and assemblies.

UV and IR Interferometers - Interferometers using invisible light at both longer and shorter wavelengths. ZYGO is expert at interferometry at a range of wavelengths, from 266 nm to 10.6 µm infrared.

'Special' interferometers - For metrology needs outside the mainstream production offerings of ZYGO - and ZYGO's catalog of standard interferometers is larger than any - we have a special group of experts dedicated to producing precision systems for limited production. Unusual configurations, wavelengths and apertures are all part of our capabilities.

Interferometry Accessories - ZYGO qualifies all of our optical metrology accessories to ensure optimal interferometer performance. Our accessories include transmission and reference optics, opto-mechanical mounts and fixtures, radius of curvature hardware and vertical mounting options.

Upgrade Your ZYGO Interferometer - ZYGO interferometers are built to last. Through our decades of support, as technology has advanced, ZYGO continues to offer upgrades to existing systems to improve and expand their capabilities.


Verifire™ Series

Interferometer Systems

ZYGO's Verifire™ Series of laser Fizeau interferometers represent a complete line of high performance metrology instruments for the measurement of plano, spherical and aspherical surfaces and material characteristics. The systems provide a variety of proprietary acquisition techniques to ensure optimum metrology in a wide range of environments.

Verifire™ XL

Large-Aperture Downward-Looking Interferometer Workstation

Key Features:

• 12" (300 mm) aperture

• Compact footprint, self-contained system

• Easy part loading and alignment

• Simple setup and streamlined operation

• Built-in pre-aligned transmission flat

• Integrated vibration isolation and QPSI technology for reliable measurements in production environments

The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.

Vibration Robust

The Verifire XL system includes Zygo's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.

Accurate Metrology

The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.

Mx™ Software

ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes Smart Averaging technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.


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